- مبلغ: ۸۶,۰۰۰ تومان
- مبلغ: ۹۱,۰۰۰ تومان
Although the field of MEMS has expanded considerably over the last decade, the scale of operation and large surfaceto-volume ratio of the devices result in very high retarding forces such as friction and adhesion that seriously undermine the performance and reliability of the devices. These are tribological phenomena that need to be studied and understood at the micro to nanoscales. In addition, materials for MEMS must exhibit good microscale tribological properties. Alternate materials to silicon that exhibit superior tribological properties under harsh operating conditions need to be identified. There is also a need to develop lubricants and identify lubrication methods that are suitable for MEMS. A summary of macro and micro/nanotribological studies of materials and lubricants for use in MEMS devices is presented. In particular, silicon, polysilicon and SiC based materials are studied. Perfluoropolyether films and self-assembled monolayers are investigated for lubrication of MEMS. Finally, component level testing of micromotors has also been carried out to aid in better understanding of the observed tribological phenomena in MEMS.