Abstract

We have developed a new type of chemical microsensor based on piezoresistive microcantilever technology. In this embedded polymer microsensor, a piezoresistive microcantilever is partially ‘‘embedded’’ into a polymeric material. Swelling of the polymer upon analyte exposure is measured as a simple resistance change in the embedded cantilever. Arrays of these sensors, each employing a different polymeric material, provide for the identification of a wide range of chemical vapor analytes. Advantages of this system over previous ‘‘surface’’ piezoresistive microcantilever chemical sensors include enhanced mechanical simplicity (no mechanical approach necessary), greater resistance to shock or movement, and lower cost.