ترجمه مقاله نقش ضروری ارتباطات 6G با چشم انداز صنعت 4.0
- مبلغ: ۸۶,۰۰۰ تومان
ترجمه مقاله پایداری توسعه شهری، تعدیل ساختار صنعتی و کارایی کاربری زمین
- مبلغ: ۹۱,۰۰۰ تومان
In this work, a thermopile-based MEMS IR sensor is reported. In the device, a double-layer thermocouple strip structure and thermal-conductive-electricalisolated structures are adopted thus to reduce the size and to improve performance of the whole device. After being packed into a TO-5 package, the sensor achieves a responsivity of 1151.14 V/W, a detectivity of 4.15 × 108 cm Hz1/2/W, and a response time of 14.46 ms. Besides, in measurements of varied temperatures and vacuum pressures, the thermopile proposed in this work could reach relatively high sensitivities. This indicates that such a device can also function as a temperature sensor and a vacuum sensor. In this way, the applications of thermopiles are broadened.