Abstract
The aim of this paper is to examine compensating for the hysteresis error of silicon pressure sensor in order to improve the sensor accuracy. The object of investigation is large-range diffused silicon piezoresistive pressure sensors in the industrial field, based on MEMS technology. Due to the complex hysteresis characteristic of the sensor and difficulties in compensation, there are currently no published precedents in relevant studies. The author has analyzed the causation and impacting factors of the hysteresis characteristic and demonstrated, through experiment, that the silicon pressure sensor does satisfy the necessary and sufficient conditions of the general Preisach model. Through utilizing the Preisach model of the sensor and compensating for the hysteresis error using the compensation algorithm on inverse general Preisach model, the experiment has demonstrated that the hysteresis error decreases significantly after compensation, hence enhancing the precision of the sensors.
I. INTRODUCTION
HYSTERESIS characteristics are found extensively in mechanical systems such as sensors as an unusual form of nonsmooth nonlinearity with multivalued mapping. In the sensor field, hysteresis characteristics are the inconsistencies of static characteristics between ascending and descending input variables, within the full scale [1]. Of the three indicators in the judgment of sensor performances, nonlinearity errors, hysteresis errors and repeatability errors, hysteresis error alone contributes to nearly 30% of all intrinsic errors, making it the key factor in sensor precision. Up until now, existing publications relevant to the compensation of silicon pressure sensor have all focused upon nonlinearity errors and in that aspect already produced systematic and comprehensive results [2]–[4]. Moreover, repeatability errors are examples of random error whose compensation is extremely difficult to realize, hence the significance of the investigation on the causation and compensation of hysteresis errors.
VII. CONCLUSION
From the causes and influencing factors of the sensor hysteresis, one can clearly see the complexity in the patterns and rules processed by the hysteresis characteristic of the silicon pressure sensor, a special mechanic, microelectronics and hydraumatic system. The author has proposed the usage of general Preisach model of the sensor hysteresis in combination of the inverse general Preisach model which compensate for occurring hysteresis errors. The experiment regarding the necessary and sufficient conditions and the experiment of compensation for the hysteresis errors have been designed and performed, the results are as described in the following paragraph.
1) The experiment of necessary and sufficient conditions demonstrates that the silicon pressure sensor satisfy conditions for the wiping-out property to be effective, however, the presence of vertical chords congruency property may, to some extent, affect the accuracy of the compensation for the hysteresis of the sensor.
